-. Application wafer : 6”,8” or 8”, 12”
-. Wafer thickness : 200um <= (8”)
330um <= (12”)
-. Wafer warpage : 4mm>=
-. Tape wide : 300mm, 400mm
-. Application tape : normal & uv tape
-. UPH : 45 wafer/hr(12”),
50 wafer/hr(8”)
-. Main controller : PLC
-. Data & GUI : PC
-. Blade life time : 10,000 sheets
-. Ring frame stack : 100ea
-. Wafer center accuracy : +/-0.5mm
-. Pre-cut tape accuracy : +/-2mm
-. Chuck temp : 80℃ +/-5
-. Tape consumption
: 30~40mm
-. Chuck surface cleaning function
-. Wafer angle : 0′, 90’, 180’, 270’
-. Tape tension controller |