THE OTHER M/C
Wafer sorting system
CUWSA-080 / CUWSA-120
Wafer sorting system for packing & unpacking wafers

-. Application wafer : 6”,8” or 8”, 12”

-. UPH :

     coin jar to cassette 70 wafer/hr

     cassette to cassette 100 wafer/hr

-. Main controller : PLC

-. Data & GUI : PC

-. Wafer center accuracy : +/-0.5mm

-. Ability to transfer wafers between

   coin jar box and cassette

-. Coin jar box maker : e-pak, entergrice