-. Application wafer : 6”,8” or 8”,
12”
-. UPH :
coin jar to cassette 70 wafer/hr
cassette to cassette 100 wafer/hr
-. Main controller : PLC
-. Data & GUI : PC
-.
Wafer center accuracy : +/-0.5mm
-.
Ability to transfer wafers between
coin jar box and cassette
-.
Coin jar box maker : e-pak,
entergrice
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