-. Application wafer : 6”,8” or 8”,
12”
-. UPH : 100 wafer/hr(8”, 12”)
[based on UV time 5 sec]
-. Main controller : PLC
-. Data & GUI : PC
-. UV
time adjustable
-.
Dosage adjustable
-. UV
irradiation speciation ;
1) 365 nm wave
2) high pressure mercury lamp
3) 100~1000 mj/㎠
dosage
4) lamp life time 1000 hr
5) ring blower
6) UV sensor |