THE OTHER M/C
UV irradiation system
CUUVA-080 / CUUVA-120
This system automates the removal of the protection fixing tape after dicing

-. Application wafer : 6”,8” or 8”, 12”

-. UPH : 100 wafer/hr(8”, 12”)

    [based on  UV time 5 sec]

-. Main controller : PLC

-. Data & GUI : PC

-. UV time adjustable

-. Dosage adjustable

-. UV irradiation speciation ;

     1) 365 nm wave

     2) high pressure mercury lamp

     3) 100~1000 mj/dosage

     4) lamp life time 1000 hr

     5) ring blower

     6) UV sensor