-. Application wafer : 6”,8” or 8”,
12”
-. Cutting size : 299.7mm, 199.7mm
-. Application tape : LC2850 (adwill)
-. Tape thickness : 22um,25um, 40um
-. UPH : 30 wafer/hr(8”), 25wafer/hr(12”)
-. Main controller : PLC
-. Data & GUI : PC
-.
Core life time : 60,000 sheets
-.
Chuck temp : 100℃ +/-5
-.
Bond roller temp : 80℃
-.
Chuck positioning by vision system
-.
Core type tape cutting
-.
Protect tape auto detaping(removal tape)
-.
Wafer cleaning function
-.
Cooling chuck installed
-.
Wafer center accuracy : +/-0.5mm
-.
Tapeconsumption
: 30~40mm
-.
Tape tension controller |