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UV IRRADIATION SYSTEM
Auto UV irraiation system
CUUVA-080 / CUUVA-120
This system automates the removal of the protection fixing tape after dicing
Specification
| Application wafer | 6 & 8inch or 8 & 12inch |
|---|---|
| Application tape | UV tape |
| Main controller | PLC & PC |
| Dosage control | Adjustable |
| UV irradiation speciation | 1) 365nm wavelength |
| UV irradiation speciation | 2) high pressure mercury lamp |
| UV irradiation speciation | 3) Lamp life time : 1000 hr |
| UV irradiation speciation | 4) Ring blower |
| UV irradiation speciation | 5) UV sensor |
Features
- Auto communication (SECS/GEM interface)
- OHT/AGV Support (E84 Spec)
- Auto recipe selection (by hand scanner)
- Ulpa Hepa filter
- CCD Camera (4 channel)/Black box
- OCR Barcode label printer & Wafer ID reader
- Semi S2 Certificate
- CE Certificate